TY  - GEN
AU  - Freund,L.B
AU  - Suresh,S
TI  - Thin film materials: stress, defect formation, and surface evolution
SN  - 0521822815
U1  - 621.3815/2 
PY  - 2003///
CY  - Cambridge, [England] ; New York
PB  - Cambridge University Press
KW  - Thin films
UR  - http://www.loc.gov/catdir/description/cam032/2003043937.html
UR  - http://www.loc.gov/catdir/toc/cam032/2003043937.html
UR  - http://www.loc.gov/catdir/enhancements/fy0731/2003043937-b.html
ER  -